[G-9-4] New method of probing barrier integrity and low-k stability

Choong-Un Kim, D. M. Meng, W.-H. Bang, N. Michael, Y. J Park, L. Matz (1.Materials Science and Engineering, The University of Texas at Arlington, 2.Silicon Technology Development, Texas Instruments)

https://doi.org/10.7567/SSDM.2006.G-9-4