[H-10-3] Novel threshold voltage fine control method for FETs within a wafer using LDSi (Locally Differentiated Scanning ion implant)

Kyoung Bong Rouh, Min Yong Lee, Seung woo Jin, Yong Sun Sohn, Yong Soo Joung, Young Jong Ki, Il Keun Han, Yong Wook Song, sung wook Park (1.R&D Division, Hynix Semiconductor Inc.)

https://doi.org/10.7567/SSDM.2006.H-10-3