[I-2-5] GaN Heteroepitaxy on Si(111) substrates Using AlN/AlGaN Superlattice Buffer Layers

Tetsuya Akasaka、Yasuyuki Kobayashi、Toshiki Makimoto (1.NTT Basic Research Laboratories, NTT Corporation)

https://doi.org/10.7567/SSDM.2006.I-2-5