[I-2-7] Hexagonal Boron Nitride Heteroepitaxial Layers on Graphitized 6H-SiC Substrate Grown by Metalorganic Vapor Phase Epitaxy

Yasuyuki Kobayashi, Hiroki Hibino, Tomohiro Nakamura, Tetsuya Akasaka, Toshiki Makimoto, Nobuo Matsumoto (1.NTT Basic Research Laboratories, NTT Corporation, 2.Shonan Institute of Technology)

https://doi.org/10.7567/SSDM.2006.I-2-7