[I-7-3] Amorphous CuxGa1-xO film deposition by ultrahigh vacuum radio frequency magnetron sputtering

H. Ishikawa, N. Takeuchi, N. Okuda, T. Takeuchi, Y. Horikoshi (1.WASEDA University, School of Science and Engineering, 2.WASEDA University, Kagami Memorial Lauboratory for Material Research and Technology)

https://doi.org/10.7567/SSDM.2006.I-7-3