[J-2-4] The first principles calculations of Fermi level pinning in FUSI-PtSi/HfO2/Si system induced by local distortion of HfO2

Minoru Ikeda, Georg Kresse, Masaru Kadoshima, Toshihide Nabatame, Hideki Satake, Akira Toriumi (1.MIRAI, Association of Super-Advanced Electronics Technologies (ASET), 2.Institut fur Materialphysik, Univeisitat Wien, 3.MIRAI-AIST, 4.University of Tokyo)

https://doi.org/10.7567/SSDM.2006.J-2-4