[J-2-4] The first principles calculations of Fermi level pinning in FUSI-PtSi/HfO2/Si system induced by local distortion of HfO2

Minoru Ikeda、Georg Kresse、Masaru Kadoshima、Toshihide Nabatame、Hideki Satake、Akira Toriumi (1.MIRAI, Association of Super-Advanced Electronics Technologies (ASET)、2.Institut fur Materialphysik, Univeisitat Wien、3.MIRAI-AIST、4.University of Tokyo)

https://doi.org/10.7567/SSDM.2006.J-2-4