The Japan Society of Applied Physics

[J-3-2] Real-Time Observation of Initial Thermal Oxidation on Si(110)-16×2 Surfaces by O1s Photoemission Spectroscopy Using Synchrotron Radiation

Maki Suemitsu、Atsushi Kato、Hideaki Togashi、Atsushi Konno、Yoshihisa Yamamoto、Yuden Teraoka、Akitaka Yoshigoe、Yuzuru Narita (1.Center for Interdisciplinary Research, Tohoku Univ.、2.Japan Atomic Energy Agency、3.Kyushu Institute of Technology)

https://doi.org/10.7567/SSDM.2006.J-3-2