[P-1-1] Suppression of Leakage Current and Moisture Absorption of La2O3 films with Ultraviolet Ozone Post Treatment

Yi Zhao、Koji Kita、Kentaro Kyuno、Akira Toriumi (1.Department of Materials Engineering, School of Engineering, The University of Tokyo)

https://doi.org/10.7567/SSDM.2006.P-1-1