[P-1-11] Near Surface Oxide Trap Density Profiling in NO and Remote Plasma Nitrided Oxides in Nano-Scale MOSFETs, Using Multi-Temperature Charge Pumping Technique: Not vs. Oxide Processing

Younghwan Son, Chang-Ki Baek, Bomsoo Kim, In-Shik Han, Tae-Gyu Goo, Hi-Deok Leeand, Dae M. Kim (1.Department of Electronics Engineering, Chungnam National University, 2.Korea Institute for Advanced Study)

https://doi.org/10.7567/SSDM.2006.P-1-11