The Japan Society of Applied Physics

[P-1-12] Ultra-thin Oxide Lifetime Projection and Comparison of nFET and pFET for 90nm/65nm Application

Cheng-Li Lin, Tom Kao, Ju-Ping Chen, Jerry Shieh, K. C. Su (1.Q&RA Division, United Microelectronics Corporation (UMC))

https://doi.org/10.7567/SSDM.2006.P-1-12