[P-1-16] Precise Extraction of Metal Gate Work Function from Bevel Structures

Atsushi Kuriyama, Olivier Faynot, Laurent Brevard, Amelie Tozzo, Laurence Clerc, Jerome Mitard, Vincent Vidal, Simon Deleonibus, Sorin Cristoloveanu, Hiroshi Iwai (1.CEA-LETI, CEA Grenoble, 2.STMicroelectronics, 3.IMEP (UMR CNRS-INPG-UJF), ENSERG, 4.Tokyo Institute of Technology, Frontier Collaborative Research Center)

https://doi.org/10.7567/SSDM.2006.P-1-16