[P-1-16] Precise Extraction of Metal Gate Work Function from Bevel Structures

Atsushi Kuriyama、Olivier Faynot、Laurent Brevard、Amelie Tozzo、Laurence Clerc、Jerome Mitard、Vincent Vidal、Simon Deleonibus、Sorin Cristoloveanu、Hiroshi Iwai (1.CEA-LETI, CEA Grenoble、2.STMicroelectronics、3.IMEP (UMR CNRS-INPG-UJF), ENSERG、4.Tokyo Institute of Technology, Frontier Collaborative Research Center)

https://doi.org/10.7567/SSDM.2006.P-1-16