[P-1-19] Nitrogen Induced Extrinsic States (NIES) in Effective Work Function Instability of TiNx/SiO2 and TiNx/HfO2 Gate Stacks

Chao-Sung Lai, Jer-Chyi Wang, Shih-Cheng Yang, Jian-Yi Wong, Shing-Kan Peng (1.Department of Electronic Engineering, Chang Gung University, 2.Nanya Technology Corporation, Hwa-Ya Technology Park)

https://doi.org/10.7567/SSDM.2006.P-1-19