Dielectric Constant Behavior of Oriented Tetragonal Zr-Si-O System

Tsunehiro Ino; Yuuichi Kamimuta; Masato Koyama; Akira Nishiyama

doi:https://doi.org/10.7567/SSDM.2006.P-1-2

2006 International Conference on Solid State Devices and Materials

2006年9月12日〜 2006年9月15日
PACIFICO Yokohama, Yokohama, Japan

[P-1-2] Dielectric Constant Behavior of Oriented Tetragonal Zr-Si-O System

Tsunehiro Ino、Yuuichi Kamimuta、Masato Koyama、Akira Nishiyama (1.Advanced LSI Technology Laboratory, Corporate Research and Development Center, TOSHIBA Corporation)

https://doi.org/10.7567/SSDM.2006.P-1-2

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