[P-1-2] Dielectric Constant Behavior of Oriented Tetragonal Zr-Si-O System

Tsunehiro Ino, Yuuichi Kamimuta, Masato Koyama, Akira Nishiyama (1.Advanced LSI Technology Laboratory, Corporate Research and Development Center, TOSHIBA Corporation)

https://doi.org/10.7567/SSDM.2006.P-1-2