[P-1-23] Microscopic Mechanism of Oxygen Transport during Thermal Silicon Oxidation

Hiroyuki Kageshima、Masashi Uematsu、Toru Akiyama、Tomonori Ito (1.NTT Basic Research Laboratories, NTT Corporation、2.Dept. of Physics Engineering, Mie Univ.)

https://doi.org/10.7567/SSDM.2006.P-1-23