[P-1-25] Rate-Limiting Reaction of Layer-by-Layer Oxidation on Si(001) Surfaces: Dependence on the First Oxide Layer Growth Kinetics

Shuichi Ogawa, Yuji Takakuwa (1.Institute of Multidisciplinary Research for Advanced Materials, Tohoku University)

https://doi.org/10.7567/SSDM.2006.P-1-25