Behavior of Local Charge Trapping Sites in La2O3-Al2O3 Composite Films under Constant Voltage Stress

Toshifumi Sago; Akiyoshi Seko; Mitsuo Sakashita; Akira Sakai; Masaki Ogawa; Shigeaki Zaima

doi:https://doi.org/10.7567/SSDM.2006.P-1-9

[P-1-9] Behavior of Local Charge Trapping Sites in La2O3-Al2O3 Composite Films under Constant Voltage Stress

Toshifumi Sago, Akiyoshi Seko, Mitsuo Sakashita, Akira Sakai, Masaki Ogawa, Shigeaki Zaima (1.Graduate School of Engineering, Nagoya University, 2.Center for Cooperative Research in Advanced Science & Technology, Nagoya University)

https://doi.org/10.7567/SSDM.2006.P-1-9

2006 International Conference on Solid State Devices and Materials

[P-1-9] Behavior of Local Charge Trapping Sites in La2O3-Al2O3 Composite Films under Constant Voltage Stress