The Japan Society of Applied Physics

[P-10-11] Reduction of Electrical Damage due to Au/Pentacene Contact Formation by Introducing Ar Gas during Au Evaporation

Tomoaki Sawabe、Koshi Okamura、Takashi Miyamoto、Masakazu Nakamura、Kazuhiro Kudo (1.Department of Electronics and Mechanical Engineering, Faculty of Engineering, Chia University、2.Toray Reserch Center, Inc.)

https://doi.org/10.7567/SSDM.2006.P-10-11