[P-10-9] Effect of Oxygen Contents on the Property of Hydrophobic Thin Films Deposited on Flexible Substrates Using Plasma-enhanced CVD

Day-Shan Liu、Cheng-Yang Wu、Bing-Wen Huang、Ching-Ting Lee (1.Institute of Electro-Optical and Materials Science, National Formosa University、2.Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University)

https://doi.org/10.7567/SSDM.2006.P-10-9