The Japan Society of Applied Physics

[P-2-1] Formation of Mesoporous Pure Silica Zeolite Film

T. Seo, T. Yoshino, N. Hata, T. Kikkawa (1.Research Center for Nanodevices and Systems, Hiroshima University, 2.MIRAI, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST))

https://doi.org/10.7567/SSDM.2006.P-2-1