[P-2-12] A Study of Relationship of Wafer Breakage vs. Wafer Edge Analysis

Sheng-Hsiung Chen, Shen-Li Chen, Wen-Kuan Yeh (1.Department of Electrical Engineer, Tung Fang Institute of Technology, 2.Department of Electronic Engineering, National United University, 3.Department of Electrical Engineering, National University of Kaohsiung)

https://doi.org/10.7567/SSDM.2006.P-2-12