[P-2-4] Comparison of the Planarization Technologies for the Next Generation

Itsuki Kobata, Yutaka Wada, Yasushi Toma, Tsukuru Suzuki, Akira Kodera, Katsuhiko Tokushige, Akira Fukunaga, Manabu Tsujimura (1.Precision Machinery Company, Ebara Corporation, 2.Ebara Research Co., Ltd.)

https://doi.org/10.7567/SSDM.2006.P-2-4