[P-2-4] Comparison of the Planarization Technologies for the Next Generation

Itsuki Kobata、Yutaka Wada、Yasushi Toma、Tsukuru Suzuki、Akira Kodera、Katsuhiko Tokushige、Akira Fukunaga、Manabu Tsujimura (1.Precision Machinery Company, Ebara Corporation、2.Ebara Research Co., Ltd.)

https://doi.org/10.7567/SSDM.2006.P-2-4