[P-3-27L] Prominent Study on Si Substrate EM Loss and Suppressing Techniques

Chih-Yuan Lee、Joseph Der-Sheng Deng、Jing-Xiang Ye、Chuan-Yu Wang、Chin-Hsing Kao (1.Semiconductor Laboratory, Dept. of Applied Physics, Chung Cheng Institute of Technology, National Defense Univ.、2.Electric Systems Research Division, Chung-Shang Institute of Science and Technology)

https://doi.org/10.7567/SSDM.2006.P-3-27L