[P-3-27L] Prominent Study on Si Substrate EM Loss and Suppressing Techniques

Chih-Yuan Lee, Joseph Der-Sheng Deng, Jing-Xiang Ye, Chuan-Yu Wang, Chin-Hsing Kao (1.Semiconductor Laboratory, Dept. of Applied Physics, Chung Cheng Institute of Technology, National Defense Univ., 2.Electric Systems Research Division, Chung-Shang Institute of Science and Technology)

https://doi.org/10.7567/SSDM.2006.P-3-27L