[P-7-6] AlGaN Ultraviolet Metal-Semiconductor-Metal Photodetectors with Low-Temperature-Grown Cap Layers

Shoou-Jinn Chang, Ming-Hsien Wu, Hung Hung, Yi-Chao Lin, Hon Kuan, Ray-Ming Lin, Chin-Hsaing Chen (1.Institute of Microelectronics and Department of Electrical Engineering, National Cheng Kung University, 2.Department of Electrical Engineering, Far East College, 3.Department of Electronics Engineering, Chang Gung University, 4.Department of Electronics Engineering, Cheng Shiu University)

https://doi.org/10.7567/SSDM.2006.P-7-6