Optical constants of beta-FeSi2 film on Si substrate obtained from transmittance and reflectance data and origin of Urbach-tail

Hirofumi Kakemoto; Tohru Higuchi; Hajime Shibata; Satoshi Wada; Takaaki Tsurumi

doi:https://doi.org/10.7567/SSDM.2006.P-7-8

[P-7-8] Optical constants of beta-FeSi2 film on Si substrate obtained from transmittance and reflectance data and origin of Urbach-tail

Hirofumi Kakemoto、Tohru Higuchi、Hajime Shibata、Satoshi Wada、Takaaki Tsurumi (1.Graduate school of science and engineering, Tokyo Institute of Technology、2.Department of applied physics, Faculty of science, Tokyo Univ. of Science、3.National Institute of Advanced Industrial Science and Technology)

https://doi.org/10.7567/SSDM.2006.P-7-8

2006 International Conference on Solid State Devices and Materials

[P-7-8] Optical constants of beta-FeSi2 film on Si substrate obtained from transmittance and reflectance data and origin of Urbach-tail