The Japan Society of Applied Physics

[P-8-12] Enlargement of Crystal-Grains in Thin Silicon Films Using Continuous-Wave Laser Irradiation

Shuntaro Fujii, Shin-Ichiro Kuroki, Koji Kotani, Takashi Ito (1.Graduate School of Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.2006.P-8-12