[P-8-13] Kinetic Monte Carlo (KMC) Modeling for Boron Diffusion in Strained Silicon

Young-Kyu Kim, Kwan-Sun Yoon, Taeyoung Won (1.School of Electrical Engineering, National IT Research Center for Computational Electronics Inha University)

https://doi.org/10.7567/SSDM.2006.P-8-13