Kinetic Monte Carlo (KMC) Modeling for Boron Diffusion in Strained Silicon

Young-Kyu Kim; Kwan-Sun Yoon; Taeyoung Won

doi:https://doi.org/10.7567/SSDM.2006.P-8-13

2006 International Conference on Solid State Devices and Materials

2006年9月12日〜 2006年9月15日
PACIFICO Yokohama, Yokohama, Japan

[P-8-13] Kinetic Monte Carlo (KMC) Modeling for Boron Diffusion in Strained Silicon

Young-Kyu Kim、Kwan-Sun Yoon、Taeyoung Won (1.School of Electrical Engineering, National IT Research Center for Computational Electronics Inha University)

https://doi.org/10.7567/SSDM.2006.P-8-13

▲