The Japan Society of Applied Physics

[P-8-15] Moisture-Barrier Properties of Carbon-coated Silicon Oxide Films

Wen-Ray Chen, Hsiung-Ming Guo, Teen-Hang Meen, Kuen-Hsien Wu, Fuh-Shyang Juang, Chien-Jung Huang (1.Department of Electronic Engineering, National Formosa University, 2.Department of Electrical Engineering, Southern Taiwan University of Technology, 3.Department of Electro-Optics Engineering, National Formosa University, 4.Department of Applied Physics, National University of Kaohsiung)

https://doi.org/10.7567/SSDM.2006.P-8-15