The Japan Society of Applied Physics

[P-8-15] Moisture-Barrier Properties of Carbon-coated Silicon Oxide Films

Wen-Ray Chen、Hsiung-Ming Guo、Teen-Hang Meen、Kuen-Hsien Wu、Fuh-Shyang Juang、Chien-Jung Huang (1.Department of Electronic Engineering, National Formosa University、2.Department of Electrical Engineering, Southern Taiwan University of Technology、3.Department of Electro-Optics Engineering, National Formosa University、4.Department of Applied Physics, National University of Kaohsiung)

https://doi.org/10.7567/SSDM.2006.P-8-15