TiO2 nanocrystal prepared by ALD system at elevated temperature

C. H. Lin; C. C. Wang; P. J. Tzeng; S. Maikap; H. Y. Lee; L. S. Lee; M.-J. Tsai

doi:https://doi.org/10.7567/SSDM.2006.P-8-16

2006 International Conference on Solid State Devices and Materials

Sep 12, 2006 - Sep 15, 2006
PACIFICO Yokohama, Yokohama, Japan

[P-8-16] TiO2 nanocrystal prepared by ALD system at elevated temperature

C. H. Lin, C. C. Wang, P. J. Tzeng, S. Maikap, H. Y. Lee, L. S. Lee, M.-J. Tsai (1.Electronics and Opto-Electronics Research Laboratories Industrial Technology Research Institute)

https://doi.org/10.7567/SSDM.2006.P-8-16

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