Study of the Improved conductivity of Indium-tin Oxide Films Cosputtered with Zinc Oxide at Room Temperature from Thermal Degradations

Day-Shan Liu; Chun-Hsing Lin; Chia-Sheng Sheu; Ching-Ting Lee

doi:https://doi.org/10.7567/SSDM.2006.P-8-21

[P-8-21] Study of the Improved conductivity of Indium-tin Oxide Films Cosputtered with Zinc Oxide at Room Temperature from Thermal Degradations

Day-Shan Liu、Chun-Hsing Lin、Chia-Sheng Sheu、Ching-Ting Lee (1.Institute of Electro-Optical and Materials Science, National Formosa University、2.Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University)

https://doi.org/10.7567/SSDM.2006.P-8-21

2006 International Conference on Solid State Devices and Materials

[P-8-21] Study of the Improved conductivity of Indium-tin Oxide Films Cosputtered with Zinc Oxide at Room Temperature from Thermal Degradations