[C-7-1] Impacts of Cu/TaN Electrode on the Electrical Properties of Metal-insulator-metal (Ba,Sr)TiO3 Thin-film Capacitors

Wen-Fa Wu, Kou-Chiang Tsai, Chuen-Guang Chao, Jain-Tsai Lee, Wei-Che Chang, Tsung-Kuei Kang, Guo-Shen Jheng, Jian-Yang Lin (1.National Nano Device Laboratories, 2.Department of Materials Science and Engineering, National Chiao-Tung University, 3.Department of Electronic Engineering, Feng-Chia University, 4.Department of Electronic Engineering, National Yunlin University of Science and Technology)

https://doi.org/10.7567/SSDM.2007.C-7-1