[C-7-1] Impacts of Cu/TaN Electrode on the Electrical Properties of Metal-insulator-metal (Ba,Sr)TiO3 Thin-film Capacitors

Wen-Fa Wu、Kou-Chiang Tsai、Chuen-Guang Chao、Jain-Tsai Lee、Wei-Che Chang、Tsung-Kuei Kang、Guo-Shen Jheng、Jian-Yang Lin (1.National Nano Device Laboratories、2.Department of Materials Science and Engineering, National Chiao-Tung University、3.Department of Electronic Engineering, Feng-Chia University、4.Department of Electronic Engineering, National Yunlin University of Science and Technology)

https://doi.org/10.7567/SSDM.2007.C-7-1