The Japan Society of Applied Physics

[C-9-2] Influences of Skeletal Structure and Porosity on Dielectric and Mechanical Properties of Porous Organosilica Low-k Films

Syozo Takada、Nobuhiro Hata、Yutaka Seino、Takenobu Yoshino (1.Advanced Semiconductor Research Center, National Institute of Advanced Industrial Science and Technology (AIST))

https://doi.org/10.7567/SSDM.2007.C-9-2