Large Displacement Micro XY-Stage with Paired Moving Plates

Minoru Sasaki; Fuminori Bono; Kazuhiro Hane

doi:https://doi.org/10.7567/SSDM.2007.D-2-2

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[D-2-2] Large Displacement Micro XY-Stage with Paired Moving Plates

Minoru Sasaki、Fuminori Bono、Kazuhiro Hane (1.Toyota Technological Institute, Dept. of Advanced Science and Technology、2.Tohoku University, Dept. of Nanomechanics)

https://doi.org/10.7567/SSDM.2007.D-2-2

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