RF-MEMS Switch Structure for Low-Voltage Actuation and High-Density Integration

Kei Kuwabara; Norio Sato; Hiroki Morimura; Junichi Kodate; Toshikazu Kamei; Katsuyuki Machida; Hiromu Ishii

doi:https://doi.org/10.7567/SSDM.2007.D-2-3

2007 International Conference on Solid State Devices and Materials

Sep 18, 2007 - Sep 21, 2007
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[D-2-3] RF-MEMS Switch Structure for Low-Voltage Actuation and High-Density Integration

Kei Kuwabara, Norio Sato, Hiroki Morimura, Junichi Kodate, Toshikazu Kamei, Katsuyuki Machida, Hiromu Ishii (1.NTT Microsystem Integration Laboratories, NTT Corporation, 2.NTT Advanced Technology Corporation)

https://doi.org/10.7567/SSDM.2007.D-2-3

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