RF-MEMS Switch Structure for Low-Voltage Actuation and High-Density Integration

Kei Kuwabara; Norio Sato; Hiroki Morimura; Junichi Kodate; Toshikazu Kamei; Katsuyuki Machida; Hiromu Ishii

doi:https://doi.org/10.7567/SSDM.2007.D-2-3

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[D-2-3] RF-MEMS Switch Structure for Low-Voltage Actuation and High-Density Integration

Kei Kuwabara、Norio Sato、Hiroki Morimura、Junichi Kodate、Toshikazu Kamei、Katsuyuki Machida、Hiromu Ishii (1.NTT Microsystem Integration Laboratories, NTT Corporation、2.NTT Advanced Technology Corporation)

https://doi.org/10.7567/SSDM.2007.D-2-3

▲