The Japan Society of Applied Physics

[D-2-4] Performance of Tense Thin Film Torsion Bar for Large-Rotation and Low-Voltage Driving of Micromirror

Minoru Sasaki, Shinya Yuki, Kazuhiro Hane (1.Toyota Technological Institute, Dept. of Advanced Science and Technology, 2.Tohoku University, Dept. of Nanomechanics)

https://doi.org/10.7567/SSDM.2007.D-2-4