Performance of Tense Thin Film Torsion Bar for Large-Rotation and Low-Voltage Driving of Micromirror

Minoru Sasaki; Shinya Yuki; Kazuhiro Hane

doi:https://doi.org/10.7567/SSDM.2007.D-2-4

2007 International Conference on Solid State Devices and Materials

Sep 18, 2007 - Sep 21, 2007
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[D-2-4] Performance of Tense Thin Film Torsion Bar for Large-Rotation and Low-Voltage Driving of Micromirror

Minoru Sasaki, Shinya Yuki, Kazuhiro Hane (1.Toyota Technological Institute, Dept. of Advanced Science and Technology, 2.Tohoku University, Dept. of Nanomechanics)

https://doi.org/10.7567/SSDM.2007.D-2-4

▲