Floating Gate MOS Capacitor with High-Density Nanodots Array Produced by Protein Supramolecule

Kiyohito Yamada; Shigeo Yoshii; Shinya Kumagai; Atsushi Miura; Yukiharu Uraoka; Takashi Fuyuki; Ichiro Yamashita

doi:https://doi.org/10.7567/SSDM.2007.D-8-2

[D-8-2] Floating Gate MOS Capacitor with High-Density Nanodots Array Produced by Protein Supramolecule

Kiyohito Yamada、Shigeo Yoshii、Shinya Kumagai、Atsushi Miura、Yukiharu Uraoka、Takashi Fuyuki、Ichiro Yamashita (1.Advanced Technology Research Laboratories, Matsushita Electric Industrial Co., Ltd.、2.Graduate School of Materials Science, Nara Institute of Science and Technology、3.Core Research for Evolutional Science and Technology, Japan Science and Technology Agency)

https://doi.org/10.7567/SSDM.2007.D-8-2

2007 International Conference on Solid State Devices and Materials

[D-8-2] Floating Gate MOS Capacitor with High-Density Nanodots Array Produced by Protein Supramolecule