Visible Light Emission from Controlled α-Si/SiN Multi-layer Structures

Q. Chen; W. K. Tan; M. B. Yu; L. Ding; T. P. Chen; G. Q. Lo; D. L. Kwong

doi:https://doi.org/10.7567/SSDM.2007.E-2-6

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[E-2-6] Visible Light Emission from Controlled α-Si/SiN Multi-layer Structures

Q. Chen、W. K. Tan、M. B. Yu、L. Ding、T. P. Chen、G. Q. Lo、D. L. Kwong (1.IInstitute of Microelectronics、2.School of Electrical and Electronic Engineering, Nanyang Technological University)

https://doi.org/10.7567/SSDM.2007.E-2-6

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