Visible Light Emission from Controlled α-Si/SiN Multi-layer Structures

Q. Chen; W. K. Tan; M. B. Yu; L. Ding; T. P. Chen; G. Q. Lo; D. L. Kwong

doi:https://doi.org/10.7567/SSDM.2007.E-2-6

2007 International Conference on Solid State Devices and Materials

Sep 18, 2007 - Sep 21, 2007
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[E-2-6] Visible Light Emission from Controlled α-Si/SiN Multi-layer Structures

Q. Chen, W. K. Tan, M. B. Yu, L. Ding, T. P. Chen, G. Q. Lo, D. L. Kwong (1.IInstitute of Microelectronics, 2.School of Electrical and Electronic Engineering, Nanyang Technological University)

https://doi.org/10.7567/SSDM.2007.E-2-6

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