A Study on the Design and Properties of an SiON/SiO2 Waveguide: The Effect of the Substrate on Propagation Loss

Jun USHIDA; Akiko GOMYO; Junichi FUJIKATA; Daisuke OKAMOTO; Kenichi NISHI; Keishi OHASHI; Toshifumi WATANABE; Tai TSUCHIZAWA; Koji YAMADA; Seiichi ITABASHI

doi:https://doi.org/10.7567/SSDM.2007.E-3-2

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[E-3-2] A Study on the Design and Properties of an SiON/SiO2 Waveguide: The Effect of the Substrate on Propagation Loss

Jun USHIDA、Akiko GOMYO、Junichi FUJIKATA、Daisuke OKAMOTO、Kenichi NISHI、Keishi OHASHI、Toshifumi WATANABE、Tai TSUCHIZAWA、Koji YAMADA、Seiichi ITABASHI (1.MIRAI-Selete、2.NTT Microsystem Integration Labs.)

https://doi.org/10.7567/SSDM.2007.E-3-2

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