A Study on the Design and Properties of an SiON/SiO2 Waveguide: The Effect of the Substrate on Propagation Loss

Jun USHIDA; Akiko GOMYO; Junichi FUJIKATA; Daisuke OKAMOTO; Kenichi NISHI; Keishi OHASHI; Toshifumi WATANABE; Tai TSUCHIZAWA; Koji YAMADA; Seiichi ITABASHI

doi:https://doi.org/10.7567/SSDM.2007.E-3-2

2007 International Conference on Solid State Devices and Materials

Sep 18, 2007 - Sep 21, 2007
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[E-3-2] A Study on the Design and Properties of an SiON/SiO2 Waveguide: The Effect of the Substrate on Propagation Loss

Jun USHIDA, Akiko GOMYO, Junichi FUJIKATA, Daisuke OKAMOTO, Kenichi NISHI, Keishi OHASHI, Toshifumi WATANABE, Tai TSUCHIZAWA, Koji YAMADA, Seiichi ITABASHI (1.MIRAI-Selete, 2.NTT Microsystem Integration Labs.)

https://doi.org/10.7567/SSDM.2007.E-3-2

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