[E-6-3] Functional Enhancement of Metal-Semiconductor-Metal (MSM) Infrared Photodetectors on Heteroepitaxial SiGe-on-Si Using the Anodic Oxidation/Passivation Method

Ricky W. Chuang, Zhen-Liang Liao, Huai-Tzu Chiang, Noritaka Usami (1.Institute of Microelectronics, Department of Electrical Engineering, and Advanced Optoelectronic Technology Center (AOTC), National Cheng Kung University, 2.Institute for Materials Research, Tohoku University)

https://doi.org/10.7567/SSDM.2007.E-6-3