Dependence of Electrical Characteristics on Interfacial Structures of Epitaxial NiSi2/Si Schottky Contacts Formed from Ni/Ti/Si System

Osamu Nakatsuka; Atsushi Suzuki; Shingo Akimoto; Akira Sakai; Masaki Ogawa; Shigeaki Zaima

doi:https://doi.org/10.7567/SSDM.2007.F-10-1

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[F-10-1] Dependence of Electrical Characteristics on Interfacial Structures of Epitaxial NiSi2/Si Schottky Contacts Formed from Ni/Ti/Si System

Osamu Nakatsuka、Atsushi Suzuki、Shingo Akimoto、Akira Sakai、Masaki Ogawa、Shigeaki Zaima (1.Graduate School of Engineering, Nagoya University、2.EcoTopia Science Institute, Nagoya University)

https://doi.org/10.7567/SSDM.2007.F-10-1

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